WP5 - Waveguides
WP 5 - Waveguides

WP Leader: Dries Van Thourhout (IMEC)

Partners: ST, CEA, CNRS-FMNT



Develop suitable SOI-base photonic wiring circuitry SOI-waveguides with sub-micron dimensions.
Develop wiring circuitry with polymer based waveguides, compatible with CMOS-fabrication
Delivery of passive photonic waveguiding layer to WP3 & WP4, including necessary coupling structures

Micro-ring resonator using SOI photonic wires (Copyright IMEC)

Si3N4 Splitter Tree (Copyright CEA)

Publications for Workpackage 5

journal publications

  • W. Bogaerts, P. Dumon, D. Van Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, R. Baets, 'Compact Wavelength-Selective Functions in Silicon-on-Insulator Photonic Wires ', J. Selected Topics in Quantum Electronics, 12(6), p.1394-1401 (2006) (published)
  • W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, D. Van Thourhout, 'Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology', Journal of Lightwave Technology (invited), 23(1), p.401-412 (2005) (published)

conference publications

  • Regis Orobtchouk, Nicolas Schnell, Taha Benyattou, Jean Marc Fedeli, 'COMPACT BUILDING BLOCS FOR OPTICAL LINK ON SOI TECHNOLOGY ', ECIO 2005, Grenoble, France (March 05) (published)
  • D. Van Thourhout, P. Dumon, W. Bogaerts, G. Roelkens, D. Taillaert, G. Priem, R. Baets, 'Recent Progress in SOI Nanophotonic Waveguides ', ECOC 2005. Glasgow (invited), Sep. 2005 (published)
  • P. Dumon , G. Roelkens, W. Bogaerts, D. Van Thourhout, R. Baets, 'Basic Photonic Wire Components in SOI', Group IV photonics, Sep. 2005 (published)
  • Jeannot S, Fedeli J.M , Jousseaume V, Martin S, Mur P, Orobtchouk R, Maury P, Benyattou T, Passemard G, 'PECVD Materials for optical functions above Integrated Circuits: Three ways.', Oral paper ICO Changchun Aout 2005 (published)
  • Fedeli J.M, Kostrzewa M, Jeannot S, Di Cioccio L, Jousseaume V, Orobtchouk R, Maury P, Zussy M, 'Optical interconnect: Two different ways for waveguides and optoelectronics components on top of C-MOS', Photonics Prague 2005 conference June 8 - 11 2005 (published)
  • Simon Jeannot, Vincent Jousseaume,Jean Marc Fedeli,Steve Martin, Regis Orobtchouk, Pierre Mur, Patrick Maury, Taha Benyattou and Andrzej Kazmierzack, 'Different technological platforms for optical fonctions above integrated circuits', ECIO conference GRENOBLE 6-8 April 2005 (published)
  • P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, R. Bockstaele, 'Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography', Group IV Photonics,Hong Kong,p.WB5(2004) (published)
  • R. Clergereaux, D. Escaich, S. Martin, P. Raynaud and F. Gaillard, 'Plasma deposited carbon layers as new materials for optoelectronic applications', 16th International Vaccum Congress (IVC 16), June 28-July 2 2004, Venice, Italy (published)
  • R. Clergereaux, D. Escaich, S. Martin, P. Raynaud and F. Gaillard, 'Ageing of plasma deposited carbon layers: thickness and material structure effect', J - Synthesis, characterisation and advanced applications of amorphous carbon films, E-MRS Spring Meeting, May 24 to 28, 2004 (published)
  • R. Clergereaux, D. Escaich, S. Martin, P. Raynaud and F. Gaillard, 'Carbon layer as new material for optics', France, 9th International Conference on Electronic Materials (IUMRS-ICEM), April 12-16 2004, San Francisco, California (published)
  • S. Martin, F. Gaillard, S. Jeannot, V. Jousseaume, J-M. Fedeli, P. Maury, F. Fusalba, R. Clergereaux, D. Escaich, P. Raynaud, 'Amorphous carbon layer as new material for microelectronic optical interconnects', NEMatC 2004 symposia, March 2004, Grenoble, France (published)
  • Jeannot, S. et al. , 'Optical Interconnects: An Above IC Approach ', IITC conference, San Francisco, USA (June 2004) (published)
  • S. Jeannot et al., 'New Polymeric Material For Integration As Optical Above IC Interconnect', oral communication, 11th Meeting of the Symposium on Polymers for Microelectronics, Wilmington, Delaware, USA (May 5-7 2004) (published)

other publications

  • R. Orobtchouk, 'Couplers', 3rd Optoelectronic & Photonic Winter School on optical interconnects, 26 February 4 March, 05 (published)
  • D. Van Thourhout, 'III-V on Silicon', 3rd Optoelectronic & Photonic Winter School on optical interconnects, 26 February 4 March, 05 (published)

Deliverables for Workpackage 5



Delivery of PECVD deposited waveguides to WP3 & WP4








Delivery of SOI based waveguides to WP3 & WP4








Report on performance of different approaches for fabricating passive photonic wiring circuit







Last update:  00:52 08/04 2005